Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition BJ Choi, DS Jeong, SK Kim, C Rohde, S Choi, JH Oh, HJ Kim, CS Hwang, ...
Journal of applied physics 98 (3), 2005
1460 2005 High dielectric constant TiO2 thin films on a Ru electrode grown at 250 C by atomic-layer deposition SK Kim, WD Kim, KM Kim, CS Hwang, J Jeong
Applied Physics Letters 85 (18), 4112-4114, 2004
400 2004 Al‐Doped TiO2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors SK Kim, GJ Choi, SY Lee, M Seo, SW Lee, JH Han, HS Ahn, S Han, ...
Advanced Materials 20 (8), 1429-1435, 2008
342 2008 First-principles study of point defects in rutile E Cho, S Han, HS Ahn, KR Lee, SK Kim, CS Hwang
Physical Review B 73 (19), 193202, 2006
275 2006 Capacitors with an equivalent oxide thickness of< 0.5 nm for nanoscale electronic semiconductor memory SK Kim, SW Lee, JH Han, B Lee, S Han, CS Hwang
Advanced Functional Materials 20 (18), 2989-3003, 2010
251 2010 Atomic Layer Deposition for Semiconductors CS Hwang
Atomic Layer Deposition for Semiconductors, E1-E1, 2014
218 2014 Low temperature (< 100 C) deposition of aluminum oxide thin films by ALD with O3 as oxidant SK Kim, SW Lee, CS Hwang, YS Min, JY Won, J Jeong
Journal of The Electrochemical Society 153 (5), F69, 2006
203 2006 Comparison between ZnO films grown by atomic layer deposition using H2O or O3 as oxidant SK Kim, CS Hwang, SHK Park, SJ Yun
Thin Solid Films 478 (1-2), 103-108, 2005
203 2005 Wafer-scale growth of MoS 2 thin films by atomic layer deposition JJ Pyeon, SH Kim, DS Jeong, SH Baek, CY Kang, JS Kim, SK Kim
Nanoscale 8 (20), 10792-10798, 2016
164 2016 Atomic Layer Deposition of SrTiO3 Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors SW Lee, JH Han, S Han, W Lee, JH Jang, M Seo, SK Kim, C Dussarrat, ...
Chemistry of Materials 23 (8), 2227-2236, 2011
153 2011 Giant electrode effect on tunnelling electroresistance in ferroelectric tunnel junctions R Soni, A Petraru, P Meuffels, O Vavra, M Ziegler, SK Kim, DS Jeong, ...
Nature Communications 5 (1), 5414, 2014
139 2014 Atomic layer deposition of Ru thin films using 2, 4-(dimethylpentadienyl)(ethylcyclopentadienyl) Ru by a liquid injection system SK Kim, SY Lee, SW Lee, GW Hwang, CS Hwang, JW Lee, J Jeong
Journal of The Electrochemical Society 154 (2), D95, 2007
120 2007 Future of dynamic random-access memory as main memory SK Kim, M Popovici
MRS Bulletin 43 (5), 334-339, 2018
111 2018 Plasma-enhanced atomic layer deposition of TiO2 and Al-doped TiO2 films using N2O and O2 reactants GJ Choi, SK Kim, SJ Won, HJ Kim, CS Hwang
Journal of the Electrochemical Society 156 (9), G138, 2009
107 2009 Titanium dioxide thin films for next-generation memory devices SK Kim, KM Kim, DS Jeong, W Jeon, KJ Yoon, CS Hwang
Journal of Materials Research 28 (3), 313, 2013
106 2013 Fabrication of high-performance p-type thin film transistors using atomic-layer-deposited SnO films SH Kim, IH Baek, DH Kim, JJ Pyeon, TM Chung, SH Baek, JS Kim, ...
Journal of Materials Chemistry C 5 (12), 3139-3145, 2017
98 2017 Growth of p-Type Tin(II) Monoxide Thin Films by Atomic Layer Deposition from Bis(1-dimethylamino-2-methyl-2propoxy)tin and H2 O JH Han, YJ Chung, BK Park, SK Kim, HS Kim, CG Kim, TM Chung
Chemistry of Materials 26 (21), 6088-6091, 2014
94 2014 Atomic-layer-deposited Al2O3 thin films with thin SiO2 layers grown by in situ O3 oxidation SK Kim, CS Hwang
Journal of applied physics 96 (4), 2323-2329, 2004
92 2004 Interfacial control of oxygen vacancy doping and electrical conduction in thin film oxide heterostructures BW Veal, SK Kim, P Zapol, H Iddir, PM Baldo, JA Eastman
Nature communications 7 (1), 11892, 2016
89 2016 Investigation on the growth initiation of Ru thin films by atomic layer deposition SK Kim, JH Han, GH Kim, CS Hwang
Chemistry of materials 22 (9), 2850-2856, 2010
89 2010