Volgen
Russell Burdt
Russell Burdt
University of California San Diego
Geverifieerd e-mailadres voor asml.com
Titel
Geciteerd door
Geciteerd door
Jaar
Laser wavelength effects on the charge state resolved ion energy distributions from laser-produced Sn plasma
RA Burdt, Y Tao, MS Tillack, S Yuspeh, NM Shaikh, E Flaxer, ...
Journal of Applied Physics 107 (4), 2010
662010
Efficient 13.5 nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse
Y Tao, MS Tillack, KL Sequoia, RA Burdt, S Yuspeh, F Najmabadi
Applied Physics Letters 92 (25), 2008
662008
Experimental scaling law for mass ablation rate from a Sn plasma generated by a 1064 nm laser
RA Burdt, S Yuspeh, KL Sequoia, Y Tao, MS Tillack, F Najmabadi
Journal of applied physics 106 (3), 2009
642009
Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source
S Yuspeh, Y Tao, RA Burdt, MS Tillack, Y Ueno, F Najmabadi
Applied Physics Letters 98 (20), 2011
422011
Evaluation of nanocrystalline materials, amorphous metal alloys, and ferrites for magnetic pulse compression applications
R Burdt, RD Curry, KF McDonald, P Melcher, R Ness, C Huang
Journal of applied Physics 99 (8), 2006
292006
Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source
S Yuspeh, KL Sequoia, Y Tao, MS Tillack, R Burdt, F Najmabadi
Applied Physics Letters 93 (22), 2008
282008
Recombination effects during expansion into vacuum in laser produced Sn plasma
RA Burdt, Y Ueno, Y Tao, S Yuspeh, MS Tillack, F Najmabadi
Applied Physics Letters 97 (4), 2010
222010
Magnetic core test stand for energy loss and permeability measurements at a high constant magnetization rate and test results for nanocrystalline and ferrite materials
R Burdt, RD Curry
Review of Scientific Instruments 79 (9), 2008
222008
Spectroscopic studies of tin plasma using laser induced breakdown spectroscopy
NM Shaikh, Y Tao, RA Burdt, S Yuspeh, N Amin, MS Tillack
Journal of Physics: Conference Series 244 (4), 042005, 2010
212010
Two dimensional expansion effects on angular distribution of 13.5 nm in-band extreme ultraviolet emission from laser-produced Sn plasma
KL Sequoia, Y Tao, S Yuspeh, R Burdt, MS Tillack
Applied Physics Letters 92 (22), 2008
202008
Mass-limited Sn target irradiated by dual laser pulses for an extreme ultraviolet lithography source
Y Tao, MS Tillack, SS Harilal, KL Sequoia, RA Burdt, F Najmabadi
Optics letters 32 (10), 1338-1340, 2007
172007
Spectroscopic analysis of temperature and density of Sn plasma produced by a CO2 laser
NM Shaikh, Y Tao, RA Burdt, S Yuspeh, N Amin, MS Tillack
Journal of Applied Physics 108 (8), 2010
142010
Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas
S Yuspeh, KL Sequoia, Y Tao, MS Tillack, RA Burdt, F Najmabadi
Applied Physics Letters 96 (26), 2010
122010
Interaction of a Laser Pulse With Tin-Based Plasma for an Extreme Ultraviolet Lithography Source
Y Tao, MS Tillack, S Yuspeh, RA Burdt, NM Shaikh, N Amin, F Najmabadi
IEEE transactions on plasma science 38 (4), 714-718, 2009
112009
A high pressure flowing oil switch for gigawatt, repetitive applications
P Norgard, RD Curry, R Burdt, R Cravey, G Anderson, S Heidger
2005 IEEE Pulsed Power Conference, 1180-1183, 2005
112005
Online calibration for repetition rate dependent performance variables
JJ Thornes, T Aggarwal, KM O'brien, F Everts, HP Godfried, RA Burdt
US Patent 9,762,023, 2017
102017
Flexible CO2 laser system for fundamental research related to an extreme ultraviolet lithography source
Y Tao, MS Tillack, N Amin, RA Burdt, S Yuspeh, NM Shaikh, F Najmabadi
Review of Scientific Instruments 80 (12), 2009
92009
Evaluation of nanocrystalline materials, amorphous alloys and ferrites for repetitive-magnetic pulse compression applications
R Burdt, KF McDonald, RD Curry, B Huhman, P Melcher, R Ness, ...
2005 IEEE Pulsed Power Conference, 843-847, 2005
92005
The sixth international conference on inertial fusion sciences and applications
NM Shaikh, Y Tao, RA Burdt, S Yuspeh, N Amin, MS Tillack
Journal of Physics: Conference Series 244, 042005, 2010
62010
A high DB/DT, square-pulse excitation magnetic core test stand for comparison of ferrite, Metglas, and nanocrystalline materials
R Burdt, RD Curry
2007 16th IEEE International Pulsed Power Conference 1, 302-306, 2008
62008
Het systeem kan de bewerking nu niet uitvoeren. Probeer het later opnieuw.
Artikelen 1–20