Juergen Brugger
Juergen Brugger
Professor of Microengineering (EPFL)
Verified email at epfl.ch - Homepage
Cited by
Cited by
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
H Lorenz, M Despont, N Fahrni, J Brugger, P Vettiger, P Renaud
Sensors and Actuators A: Physical 64 (1), 33-39, 1998
Reinforcement of single-walled carbon nanotube bundles by intertube bridging
A Kis, G Csanyi, JP Salvetat, TN Lee, E Couteau, AJ Kulik, W Benoit, ...
Nature materials 3 (3), 153-157, 2004
A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
HP Lang, R Berger, F Battiston, JP Ramseyer, E Meyer, C Andreoli, ...
Appl. Phys. A 66 (ARTICLE), S61-S64, 1998
Ultrahigh density, high-data-rate NEMS-based AFM data storage system
P Vettiger, J Brugger, M Despont, U Drechsler, U Dürig, W Häberle, ...
Microelectronic Engineering 46 (1-4), 11-17, 1999
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
M Despont, H Lorenz, N Fahrni, J Brugger, P Renaud, P Vettiger
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997
Sequential position readout from arrays of micromechanical cantilever sensors
HP Lang, R Berger, C Andreoli, J Brugger, M Despont, P Vettiger, ...
Applied Physics Letters 72 (3), 383-385, 1998
Microdrop printing of hydrogel bioinks into 3D tissue‐like geometries
K Pataky, T Braschler, A Negro, P Renaud, MP Lutolf, J Brugger
Advanced Materials 24 (3), 391-396, 2012
VLSI-NEMS chip for parallel AFM data storage
M Despont, J Brugger, U Drechsler, U Dürig, W Häberle, M Lutwyche, ...
Sensors and Actuators A: Physical 80 (2), 100-107, 2000
Resistless patterning of sub-micron structures by evaporation through nanostencils
J Brugger, JW Berenschot, S Kuiper, W Nijdam, B Otter, M Elwenspoek
Microelectronic engineering 53 (1-4), 403-405, 2000
5× 5 2D AFM cantilever arrays a first step towards a Terabit storage device
M Lutwyche, C Andreoli, G Binnig, J Brugger, U Drechsler, W Häberle, ...
Sensors and Actuators A: Physical 73 (1-2), 89-94, 1999
Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
N Blanc, J Brugger, NF De Rooij, U Dürig
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
Nanoscale topographical control of capillary assembly of nanoparticles
V Flauraud, M Mastrangeli, GD Bernasconi, J Butet, DTL Alexander, ...
Nature nanotechnology 12 (1), 73-80, 2017
Soft, entirely photoplastic probes for scanning force microscopy
G Genolet, J Brugger, M Despont, U Drechsler, P Vettiger, NF De Rooij, ...
Review of scientific instruments 70 (5), 2398-2401, 1999
Micromechanical testing of SU‐8 cantilevers
M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, D Moore, J Brugger
Fatigue & Fracture of Engineering Materials & Structures 28 (8), 735-742, 2005
Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling
A Meister, M Liley, J Brugger, R Pugin, H Heinzelmann
Applied Physics Letters 85 (25), 6260-6262, 2004
Parallel nanodevice fabrication using a combination of shadow mask and scanning probe methods
R Lüthi, RR Schlittler, J Brugger, P Vettiger, ME Welland, JK Gimzewski
Applied physics letters 75 (9), 1314-1316, 1999
Submicrometer Hall devices fabricated by focused electron-beam-induced deposition
G Boero, I Utke, T Bret, N Quack, M Todorova, S Mouaziz, P Kejik, ...
Applied Physics Letters 86 (4), 042503, 2005
Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition
C Danelon, C Santschi, J Brugger, H Vogel
Langmuir 22 (25), 10711-10715, 2006
Metallic nanowires by full wafer stencil lithography
O Vazquez-Mena, G Villanueva, V Savu, K Sidler, MAF Van Den Boogaart, ...
Nano Letters 8 (11), 3675-3682, 2008
Tuning the Dimensions and Periodicities of Nanostructures Starting from the Same Polystyrene‐block‐poly(2‐vinylpyridine) Diblock Copolymer
S Krishnamoorthy, R Pugin, J Brugger, H Heinzelmann, C Hinderling
Advanced Functional Materials 16 (11), 1469-1475, 2006
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