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Jing Jiang
Jing Jiang
Research scientist, Imec
Verified email at cornell.edu
Title
Cited by
Cited by
Year
Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups
L Li, S Chakrabarty, J Jiang, B Zhang, C Ober, EP Giannelis
Nanoscale 8 (3), 1338-1343, 2016
612016
Metal oxide nanoparticle photoresists for EUV patterning
J Jiang, S Chakrabarty, M Yu, CK Ober
Journal of Photopolymer Science and Technology 27 (5), 663-666, 2014
552014
Ultrafast self-assembly of sub-10 nm block copolymer nanostructures by solvent-free high-temperature laser annealing
J Jiang, AG Jacobs, B Wenning, C Liedel, MO Thompson, CK Ober
ACS applied materials & interfaces 9 (37), 31317-31324, 2017
392017
Unraveling the role of secondary electrons upon their interaction with photoresist during EUV exposure
I Pollentier, Y Vesters, J Jiang, P Vanelderen, D De Simone
International Conference on Extreme Ultraviolet Lithography 2017 10450, 65-71, 2017
262017
Oxide nanoparticle EUV (ONE) photoresists: Current understanding of the unusual patterning mechanism
J Jiang, B Zhang, M Yu, L Li, M Neisser, JS Chun, EP Giannelis, CK Ober
Journal of Photopolymer Science and Technology 28 (4), 515-518, 2015
262015
Comparative Metabolomic Study of Penicillium chrysogenum During Pilot and Industrial Penicillin Fermentations
MZ Ding, H Lu, JS Cheng, Y Chen, J Jiang, B Qiao, BZ Li, YJ Yuan
Applied biochemistry and biotechnology 168, 1223-1238, 2012
172012
Difference in EUV photoresist design towards reduction of LWR and LCDU
J Jiang, D De Simone, G Vandenberghe
Advances in Patterning Materials and Processes XXXIV 10146, 64-71, 2017
152017
New developments in ligand-stabilized metal oxide nanoparticle photoresists for EUV lithography
C Ober, J Jiang, B Zhang, L Li, E Giannelis, JS Chun, M Neisser, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 27-32, 2015
152015
Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing
AG Jacobs, B Jung, J Jiang, CK Ober, MO Thompson
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031205-031205, 2015
142015
Laser spike annealing of DSA photoresists
J Jiang, A Jacobs, MO Thompson, CK Ober
Journal of Photopolymer Science and Technology 28 (5), 631-634, 2015
132015
Sensitizers in EUV chemically amplified resist: mechanism of sensitivity improvement
Y Vesters, J Jiang, H Yamamoto, D De Simone, T Kozawa, S De Gendt, ...
Extreme Ultraviolet (EUV) Lithography IX 10583, 28-38, 2018
122018
Metal sensitizer in chemically amplified EUV resist: a study of sensitivity enhancement and dissolution
J Jiang, D De Simone, G Vandenberghe
Journal of Photopolymer Science and Technology 30 (5), 591-597, 2017
82017
Role of Metal Sensitizers for Sensitivity Improvement in EUV Chemically Amplified Resist
H Yamamoto, Y Vesters, J Jiang, D De Simone, G Vandenberghe, ...
Journal of photopolymer science and technology 31 (6), 747-751, 2018
72018
Systematic study of ligand structures of metal oxide EUV nanoparticle photoresists
J Jiang, M Yu, B Zhang, M Neisser, JS Chun, EP Giannelis, CK Ober
Extreme Ultraviolet (EUV) Lithography VI 9422, 664-669, 2015
72015
Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvement
Y Vesters, J Jiang, H Yamamoto, D De Simone, T Kozawa, S De Gendt, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 17 (4), 043506-043506, 2018
62018
Sensitizer for euv chemically amplified resist: Metal versus halogen
J Jiang, G Giordano, R Fallica, D DeSimone, G Vandenberghe
Journal of Photopolymer Science and Technology 32 (1), 21-25, 2019
52019
Impact of acid statistics on EUV local critical dimension uniformity
J Jiang, D De Simone, O Yildirim, M Meeuwissen, R Hoefnagels, ...
Extreme Ultraviolet (EUV) Lithography VIII 10143, 428-438, 2017
52017
Line edge roughness of high deprotection activation energy photoresist by using sub-millisecond post exposure bake
J Jiang, B Jung, MO Thompson, CK Ober
Advances in Resist Materials and Processing Technology XXX 8682, 443-449, 2013
52013
Chemical reaction and diffusion kinetics during laser-induced submillisecond heating for lithographic applications
J Jiang, B Jung, MO Thompson, CK Ober
Journal of Vacuum Science & Technology B 37 (4), 2019
32019
Line width roughness reduction by rational design of photoacid generator for sub-millisecond laser post-exposure bake
J Jiang, MO Thompson, CK Ober
Advances in Patterning Materials and Processes XXXI 9051, 81-86, 2014
32014
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Articles 1–20