Segui
Alexey Kovalgin
Alexey Kovalgin
Associate Professor, University of Twente, Enschede, NL
Email verificata su utwente.nl
Titolo
Citata da
Citata da
Anno
Semiconductor processing apparatus with compact free radical source
AY Kovalgin, AAI Aarnink
US Patent App. 13/918,094, 2013
2422013
Selective deposition of tungsten
AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters
US Patent 10,714,385, 2020
2252020
Method of forming a device structure using selective deposition of gallium nitride and system for same
S Banerjee, A Aarnink, A Kovalgin
US Patent App. 16/712,707, 2020
1282020
CO interaction with the surface of thermally activated CaO and MgO
MA Babaeva, DS Bystrov, AY Kovalgin, AA Tsyganenko
Journal of Catalysis 123 (2), 396-416, 1990
1161990
Selective deposition of tungsten
AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters
US Patent App. 16/926,192, 2020
1042020
Systematic TLM measurements of NiSi and PtSi specific contact resistance to n-and p-type Si in a broad doping range
N Stavitski, MJH Van Dal, A Lauwers, C Vrancken, AY Kovalgin, ...
IEEE electron device letters 29 (4), 378-381, 2008
1022008
Growth kinetics and oxidation mechanism of ALD TiN thin films monitored by in situ spectroscopic ellipsometry
H Van Bui, AW Groenland, AAI Aarnink, RAM Wolters, J Schmitz, ...
Journal of the Electrochemical Society 158 (3), H214, 2011
662011
Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization
N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters
IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009
622009
Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
H Van Bui, FB Wiggers, A Gupta, MD Nguyen, AAI Aarnink, MP de Jong, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 33 (1 …, 2015
522015
On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
H Van Bui, AY Kovalgin, RAM Wolters
Applied surface science 269, 45-49, 2013
472013
From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder
F Grillo, H Van Bui, D La Zara, AAI Aarnink, AY Kovalgin, P Kooyman, ...
Small 14 (23), 1800765, 2018
462018
Self-limiting growth and thickness-and temperature-dependence of optical constants of ALD AlN thin films
H Van Bui, MD Nguyen, FB Wiggers, AAI Aarnink, MP de Jong, ...
ECS journal of solid state science and technology 3 (4), P101, 2014
372014
Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD
A Boogaard, AY Kovalgin, I Brunets, AAI Aarnink, J Holleman, ...
Surface and Coatings Technology 201 (22-23), 8976-8980, 2007
312007
Evaluation of transmission line model structures for silicide-to-silicon specific contact resistance extraction
N Stavitski, MJH van Dal, A Lauwers, C Vrancken, AY Kovalgin, ...
IEEE transactions on electron devices 55 (5), 1170-1176, 2008
302008
Hot‐Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry
AY Kovalgin, M Yang, S Banerjee, RO Apaydin, AAI Aarnink, S Kinge, ...
Advanced materials interfaces 4 (18), 1700058, 2017
282017
Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules
R Friedlein, H Van Bui, FB Wiggers, Y Yamada-Takamura, AY Kovalgin, ...
The Journal of Chemical Physics 140 (20), 204705, 2014
272014
Integration of solar cells on top of CMOS chips part I: A-Si solar cells
J Lu, AY Kovalgin, KHM van der Werf, REI Schropp, J Schmitz
IEEE transactions on electron devices 58 (7), 2014-2021, 2011
272011
Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices
I Brunets, AAI Aarnink, A Boogaard, AY Kovalgin, RAM Wolters, ...
Surface and coatings technology 201 (22-23), 9209-9214, 2007
252007
Chemical modeling of a high-density inductively-coupled plasma reactor containing silane
AY Kovalgin, A Boogaard, I Brunets, J Holleman, J Schmitz
Surface and coatings technology 201 (22-23), 8849-8853, 2007
252007
Conduction and electric field effect in ultra-thin TiN films
H Van Bui, AY Kovalgin, J Schmitz, RAM Wolters
Applied physics letters 103 (5), 051904, 2013
222013
Il sistema al momento non può eseguire l'operazione. Riprova più tardi.
Articoli 1–20