| Spin transport, magnetoresistance, and electrically detected magnetic resonance in amorphous hydrogenated silicon nitride MJ Mutch, PM Lenahan, SW King Applied Physics Letters 109 (6), 062403, 2016 | 24 | 2016 |
| Defect chemistry and electronic transport in low-κ dielectrics studied with electrically detected magnetic resonance MJ Mutch, PM Lenahan, SW King Journal of Applied Physics 119 (9), 094102, 2016 | 21 | 2016 |
| Band diagram for low-k/Cu interconnects: The starting point for understanding back-end-of-line (BEOL) electrical reliability MJ Mutch, T Pomorski, BC Bittel, CJ Cochrane, PM Lenahan, X Liu, ... Microelectronics Reliability 63, 201-213, 2016 | 17 | 2016 |
| Quantitative electrically detected magnetic resonance for device reliability studies CJ Cochrane, M Anders, M Mutch, P Lenahan 2014 IEEE International Integrated Reliability Workshop Final Report (IIRW), 6-9, 2014 | 3 | 2014 |
| Radiation induced leakage currents in dense and porous low-k dielectrics RJ Waskiewicz, MJ Mutch, PM Lenahan, SW King 2016 IEEE International Integrated Reliability Workshop (IIRW), 99-102, 2016 | 2 | 2016 |
| Methods of forming crystallized materials from amorphous materials AA Chavan, DVN Ramaswamy, M Mutch, S Chhajed US Patent 10,790,145, 2020 | | 2020 |
| Devices comprising crystalline materials and related systems M Mutch, M Nahar, WI Kinney US Patent App. 16/898,029, 2020 | | 2020 |
| Methods of forming semiconductor structures M Mutch, M Nahar, WI Kinney US Patent 10,707,298, 2020 | | 2020 |
| Methods of forming semiconductor structures M Mutch, M Nahar US Patent App. 16/121,928, 2020 | | 2020 |
| Methods of Forming Crystalline Semiconductor Material, and Methods of Forming Transistors M Nahar, DF Fan, J Liu-Norrod, M Mutch US Patent App. 16/112,410, 2020 | | 2020 |
| Defects in N-Rich, Si-Rich, and Stoichiometric Silicon Nitride Thin Films Observed Using Electrically Detected Magnetic Resonance and Near-Zero Field Magnetoresistance R Waskiewicz, M Mutch, P Lenahan, S King APS 2018, K11. 013, 2018 | | 2018 |
| Electrically Detected Study of Variable Range Hopping in Silicon Nitrides R Waskiewicz, M Mutch, P Lenahan, S King APS 2017, E42. 004, 2017 | | 2017 |
| Magnetic Resonance and Magnetoresistance for the Understanding of Defect Chemistry and Spin-Transport in Amorphous Semiconductors and Dielectrics MJ Mutch | | 2016 |
| Band diagram for low-k/Cu interconnects MJ Mutch, T Pomorski, BC Bittel, CJ Cochrane, PM Lenahan, X Liu, ... Microelectronics Reliability, 2016 | | 2016 |
| КОНФЕРЕНЦИЯ SE Tyaginov, A Makarov, M Jech, P Sharma, T Grasser, J Franco, ... | | 2016 |
| Magnetoresistance Phenomena in a Variety of Amorphous Semiconductors and Insulators M Mutch, D Westley, P Lenahan APS 2016, H7. 006, 2016 | | 2016 |
| PLATFORM TECHNICAL PRESENTATIONS Session U Celano, W Vandervorst, C Cochrane, M Anders, M Mutch, P Lenahan, ... | | |
