Perspectives on oblique angle deposition of thin films: From fundamentals to devices A Barranco, A Borras, AR Gonzalez-Elipe, A Palmero
Progress in Materials Science 76, 59-153, 2016
597 2016 Nanocolumnar coatings with selective behavior towards osteoblast and Staphylococcus aureus proliferation I Izquierdo-Barba, JM García-Martín, R Álvarez, A Palmero, J Esteban, ...
Acta biomaterialia 15, 20-28, 2015
126 2015 Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures R Álvarez, JM García-Martín, M Macías-Montero, L González-García, ...
Nanotechnology 24 (4), 045604, 2013
103 2013 Nanostructured Ti thin films by magnetron sputtering at oblique angles R Álvarez, JM García-Martín, A García-Valenzuela, M Macias-Montero, ...
Journal of Physics D: Applied Physics 49 (4), 045303, 2015
86 2015 Tilt angle control of nanocolumns grown by glancing angle sputtering at variable argon pressures JM García-Martín, R Álvarez, P Romero-Gómez, A Cebollada, A Palmero
Applied Physics Letters 97 (17), 2010
82 2010 Nanocolumnar growth of thin films deposited at oblique angles: Beyond the tangent rule R Alvarez, C Lopez-Santos, J Parra-Barranco, V Rico, A Barranco, ...
Journal of Vacuum Science & Technology B 32 (4), 2014
69 2014 On the deposition rates of magnetron sputtered thin films at oblique angles R Alvarez, JM Garcia‐Martin, MC Lopez‐Santos, V Rico, FJ Ferrer, ...
Plasma Processes and Polymers 11 (6), 571-576, 2014
60 2014 Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles R Álvarez, L González-García, P Romero-Gómez, V Rico, J Cotrino, ...
Journal of Physics D: Applied Physics 44 (38), 385302, 2011
60 2011 One-dimensional analysis of the rate of plasma-assisted sputter deposition A Palmero, H Rudolph, F Habraken
Journal of Applied Physics 101 (8), 2007
50 2007 Fabrication of black-gold coatings by glancing angle deposition with sputtering A Vitrey, R Alvarez, A Palmero, MU González, JM García-Martín
Beilstein journal of nanotechnology 8 (1), 434-439, 2017
48 2017 On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles V Godinho, P Moskovkin, R Álvarez, J Caballero-Hernández, ...
Nanotechnology 25 (35), 355705, 2014
48 2014 Cholesterol biosensing with a polydopamine-modified nanostructured platinum electrode prepared by oblique angle physical vacuum deposition M Martín, P Salazar, R Álvarez, A Palmero, C López-Santos, ...
Sensors and Actuators B: Chemical 240, 37-45, 2017
46 2017 Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model A Palmero, ED Van Hattum, H Rudolph, F Habraken
Journal of Applied Physics 101 (5), 2007
43 2007 Morphological evolution of pulsed laser deposited ZrO2 thin films R Álvarez, A Palmero, LO Prieto-López, F Yubero, J Cotrino, ...
Journal of Applied Physics 107 (5), 054311-054311-10, 2010
42 2010 On the ion and neutral atom bombardment of the growth surface in magnetron plasma sputter deposition ED Van Hattum, A Palmero, WM Arnoldbik, H Rudolph, F Habraken
Applied Physics Letters 91 (17), 2007
42 2007 Antibacterial nanostructured Ti coatings by magnetron sputtering: From laboratory scales to industrial reactors R Alvarez, S Muñoz-Piña, MU González, I Izquierdo-Barba, ...
Nanomaterials 9 (9), 1217, 2019
39 2019 On the microstructure of thin films grown by an isotropically directed deposition flux R Álvarez, P Romero-Gomez, J Gil-Rostra, J Cotrino, F Yubero, ...
Journal of Applied Physics 108 (6), 2010
39 2010 Characterization of the plasma in a radio-frequency magnetron sputtering system A Palmero, ED Van Hattum, WM Arnoldbik, AM Vredenberg, F Habraken
Journal of applied physics 95 (12), 7611-7618, 2004
38 2004 Electrochromic response and porous structure of WO3 cathode layers D Louloudakis, K Mouratis, J Gil-Rostra, E Koudoumas, R Alvarez, ...
Electrochimica Acta 376, 138049, 2021
37 2021 Surface nanostructuring of thin films by high energy ion irradiation P Romero-Gomez, A Palmero, T Ben, JG Lozano, SI Molina, ...
Physical Review B 82 (11), 115420, 2010
37 2010