Real-time temperature compensation of MEMS oscillators using an integrated micro-oven and a phase-locked loop JC Salvia, R Melamud, SA Chandorkar, SF Lord, TW Kenny
Journal of Microelectromechanical Systems 19 (1), 192-201, 2009
219 2009 Temperature-insensitive composite micromechanical resonators R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ...
Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009
199 2009 A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With Frequency Stability and Integrated Jitter MH Perrott, JC Salvia, FS Lee, A Partridge, S Mukherjee, C Arft, J Kim, ...
IEEE Journal of Solid-State Circuits 48 (1), 276-291, 2012
118 2012 A 3 ppm 1.5× 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator S Zaliasl, JC Salvia, GC Hill, L Chen, K Joo, R Palwai, N Arumugam, ...
IEEE Journal of Solid-State Circuits 50 (1), 291-302, 2014
116 2014 Thermal isolation of encapsulated MEMS resonators CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ...
Journal of Microelectromechanical Systems 17 (1), 175-184, 2008
98 2008 Using the temperature dependence of resonator quality factor as a thermometer MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ...
Applied physics letters 91 (1), 2007
92 2007 A 56MΩ cmos tia for mems applications J Salvia, P Lajevardi, M Hekmat, B Murmann
2009 IEEE Custom Integrated Circuits Conference, 199-202, 2009
78 2009 CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ...
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
74 2007 Stable operation of MEMS oscillators far above the critical vibration amplitude in the nonlinear regime HK Lee, R Melamud, S Chandorkar, J Salvia, S Yoneoka, TW Kenny
Journal of microelectromechanical systems 20 (6), 1228-1230, 2011
64 2011 Operating a fingerprint sensor comprised of ultrasonic transducers JC Salvia, HY Tang, MH Perrott, BW Garlepp, E De Foras
US Patent 10,452,887, 2019
60 2019 Model and observations of dielectric charge in thermally oxidized silicon resonators G Bahl, R Melamud, B Kim, SA Chandorkar, JC Salvia, MA Hopcroft, ...
Journal of Microelectromechanical Systems 19 (1), 162-174, 2009
58 2009 High resolution microresonator-based digital temperature sensor CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ...
Applied physics letters 91 (7), 2007
58 2007 Operation of an ultrasonic sensor BW Garlepp, MH Perrott, JC Salvia
US Patent 10,539,539, 2020
52 2020 Receive operation of an ultrasonic sensor BW Garlepp, JC Salvia, MH Perrott
US Patent 10,562,070, 2020
49 2020 Sensing device with a temperature sensor N Apte, RM Berger, M Daneman, JC Salvia
US Patent 10,408,797, 2019
47 2019 Transmit beamforming of a two-dimensional array of ultrasonic transducers BW Garlepp, JC Salvia, Y Pan, MH Perrott
US Patent 10,706,835, 2020
46 2020 Two-dimensional array of CMOS control elements JC Salvia, MH Perrott, M Voros, NG Eldwin, JML Tsai, N Apte
US Patent 10,325,915, 2019
45 2019 Transmit operation of an ultrasonic sensor BW Garlepp, JC Salvia, Y Pan, MH Perrott
US Patent 10,600,403, 2020
43 2020 Image generation in an electronic device using ultrasonic transducers BW Garlepp, MH Perrott, M Daneman, JC Salvia, N Apte
US Patent 10,474,862, 2019
41 2019 Two-dimensional array of CMOS control elements JC Salvia, MH Perrott, M Voros, NG Eldwin, JML Tsai, N Apte
US Patent 10,315,222, 2019
41 2019