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Jung-Hyung Kim
Jung-Hyung Kim
Verified email at kriss.re.kr
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Cited by
Year
Plasma frequency measurements for absolute plasma density by means of wave cutoff method
JH Kim, DJ Seong, JY Lim, KH Chung
Applied physics letters 83 (23), 4725-4727, 2003
1262003
Wave cutoff method to measure absolute electron density in cold plasma
JH Kim, SC Choi, YH Shin, KH Chung
Review of scientific instruments 75 (8), 2706-2710, 2004
822004
The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor
MA Sobolewski, JH Kim
Journal of Applied Physics 102, 113302, 2007
702007
The deposition of SiOF film with low dielectric constant in a helicon plasma source
JH Kim, SH Seo, SM Yun, HY Chang, KM Lee, CK Choi
Applied physics letters 68 (11), 1507-1509, 1996
641996
A study on ion energy distribution functions and plasma potentials in helicon wave plasmas
JH Kim, HY Chang
Physics of Plasmas 3 (4), 1462-1469, 1996
411996
Frequency dependence of helicon wave plasmas near lower hybrid resonance frequency
SM Yun, JH Kim, HY Chang
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 15 (3 …, 1997
401997
An analysis on transmission microwave frequency spectrum of cut-off probe
DW Kim, SJ You, BK Na, JH Kim, HY Chang
Applied Physics Letters 99 (13), 2011
362011
Evolution of electron temperature in inductively coupled plasma
HC Lee, BH Seo, DC Kwon, JH Kim, DJ Seong, SJ Oh, CW Chung, ...
Applied Physics Letters 110 (1), 2017
312017
Role of transverse magnetic field in the capacitive discharge
SJ You, TT Hai, M Park, DW Kim, JH Kim, DJ Seong, YH Shin, SH Lee, ...
Thin Solid Films 519 (20), 6981-6989, 2011
302011
Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias
MY Yoon, HJ Yeom, JH Kim, W Chegal, YJ Cho, DC Kwon, JR Jeong, ...
Physics of Plasmas 28 (6), 2021
272021
m=/spl plusmn/1 and m=/spl plusmn/2 mode helicon wave excitation
JH Kim, SM Yun, HY Chang
IEEE transactions on plasma science 24 (6), 1364-1370, 1996
271996
Analysis of the uncertainty in the measurement of electron densities in plasmas using the wave cutoff method
JH Kim, KH Chung, YH Shin
Metrologia 42 (2), 110, 2005
252005
Measurement and analysis of electron-neutral collision frequency in the calibrated cutoff probe
KH You, SJ You, DW Kim, BK Na, BH Seo, JH Kim, HY Chang
Physics of Plasmas 23 (3), 2016
242016
Plasma density measurements by phase resolved cutoff
JH Kwon, SJ You, JH Kim, YH Shin
Applied Physics Letters 96, 081502, 2010
242010
Computational characterization of cutoff probe system for the measurement of electron density
BK Na, DW Kim, JH Kwon, HY Chang, JH Kim, SJ You
Physics of Plasmas 19 (5), 2012
212012
Plasma etching of the trench pattern with high aspect ratio mask under ion tilting
MY Yoon, HJ Yeom, JH Kim, JR Jeong, HC Lee
Applied Surface Science 595, 153462, 2022
202022
Flat cutoff probe for real-time electron density measurement in industrial plasma processing
HJ Yeom, JH Kim, DH Choi, ES Choi, MY Yoon, DJ Seong, SJ You, ...
Plasma Sources Science and Technology 29 (3), 035016, 2020
202020
Wave transmission characteristics of a wave-cutoff probe in weakly ionized plasmas
HS Jun, BK Na, HY Chang, JH Kim
Physics of Plasmas 14 (9), 2007
202007
Computational comparative study of microwave probes for plasma density measurement
DW Kim, SJ You, JH Kim, HY Chang, WY Oh
Plasma Sources Science and Technology 25 (3), 035026, 2016
192016
Sheath width effect on the determination of plasma frequency in the cutoff probe
DW Kim, SJ You, JH Kim, HY Chang, WY Oh
Applied Physics Letters 100 (24), 2012
192012
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