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S.V. Sreenivasan
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Citata da
Anno
Step and flash imprint lithography: a new approach to high-resolution patterning
M Colburn, SC Johnson, MD Stewart, S Damle, TC Bailey, B Choi, ...
Emerging Lithographic Technologies III 3676, 379-389, 1999
10561999
Step and flash imprint lithography: Template surface treatment and defect analysis
T Bailey, BJ Choi, M Colburn, M Meissl, S Shaya, JG Ekerdt, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
5112000
Step and repeat imprint lithography processes
SV Sreenivasan, BJ Choi, NE Schumaker, RD Voisin, MPC Watts, ...
US Patent 7,077,992, 2006
4382006
Mammalian cells preferentially internalize hydrogel nanodiscs over nanorods and use shape-specific uptake mechanisms
R Agarwal, V Singh, P Jurney, L Shi, SV Sreenivasan, K Roy
Proceedings of the National Academy of Sciences 110 (43), 17247-17252, 2013
4362013
Template for room temperature, low pressure micro-and nano-imprint lithography
T Bailey, BJ Choi, M Colburn, SV Sreenivasan, CG Willson, J Ekerdt
US Patent 6,696,220, 2004
4222004
Formation of discontinuous films during an imprint lithography process
BJ Choi, MJ Meissl, SV Sreenivasan, MPC Watts
US Patent 6,932,934, 2005
3842005
Step and repeat imprint lithography systems
SV Sreenivasan, MPC Watts, BJ Choi, MJ Meissl, NE Schumaker, ...
US Patent 6,900,881, 2005
3302005
Formation of discontinuous films during an imprint lithography process
BJ Choi, MJ Meissl, SV Sreenivasan, MPC Watts
US Patent 6,932,934, 2005
2972005
Alignment systems for imprint lithography
SV Sreenivasan, MPC Watts, BJ Choi, RD Voisin, NE Schumaker
US Patent 7,070,405, 2006
2892006
Method for imprint lithography using an electric field
SV Sreenivasan, RT Bonnecaze, CG Willson
US Patent 6,908,861, 2005
2462005
High precision orientation alignment and gap control stages for imprint lithography processes
BJ Choi, SV Sreenivasan, SC Johnson
US Patent 6,873,087, 2005
2452005
Alignment methods for imprint lithography
SV Sreenivasan, MPC Watts, BJ Choi, RD Voisin
US Patent 6,916,584, 2005
2432005
Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography
P Ruchhoeft, M Colburn, B Choi, H Nounu, S Johnson, T Bailey, S Damle, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999
2121999
Method to arrange features on a substrate to replicate features having minimal dimensional variability
SV Sreenivasan, MPC Watts
US Patent 8,349,241, 2013
2032013
Step & flash imprint lithography
DJ Resnick, SV Sreenivasan, CG Willson
Materials today 8 (2), 34-42, 2005
1982005
Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits
SV Sreenivasan
Microsystems & nanoengineering 3 (1), 1-19, 2017
1852017
Imprint lithography for integrated circuit fabrication
DJ Resnick, WJ Dauksher, D Mancini, KJ Nordquist, TC Bailey, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
1812003
Design of orientation stages for step and flash imprint lithography
BJ Choi, SV Sreenivasan, S Johnson, M Colburn, CG Wilson
Precision Engineering 25 (3), 192-199, 2001
1772001
Stability and traction control of an actively actuated micro‐rover
SV Sreenivasan, BH Wilcox
Journal of robotic systems 11 (6), 487-502, 1994
1721994
Development and advantages of step-and-flash lithography
M Colburn, T Bailey, BJ Choi, JG Ekerdt, SV Sreenivasan, CG Willson
Solid State Technology 44 (7), 67-80, 2001
1702001
Il sistema al momento non può eseguire l'operazione. Riprova più tardi.
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