| Nanoparticle removal with megasonics: a review S Brems, M Hauptmann, E Camerotto, A Pacco, TG Kim, X Xu, K Wostyn, ... ECS Journal of Solid State Science and Technology 3 (1), N3010, 2013 | 45 | 2013 |
| Influence of surface tension on cavitation noise spectra and particle removal efficiency in high frequency ultrasound fields E Camerotto, S Brems, M Hauptmann, A Pacco, H Struyf, PW Mertens, ... Journal of Applied Physics 112 (11), 2012 | 26 | 2012 |
| Air gap formation by UV-assisted decomposition of CVD material M Pantouvaki, A Humbert, E VanBesien, E Camerotto, Y Travaly, ... Microelectronic Engineering 85 (10), 2071-2074, 2008 | 24 | 2008 |
| Study of ultrasound-assisted radio-frequency plasma discharges in n-dodecane E Camerotto, P De Schepper, AY Nikiforov, S Brems, D Shamiryan, ... Journal of Physics D: Applied Physics 45 (43), 435201, 2012 | 21 | 2012 |
| Record performance Top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheets S Ramesh, T Ivanov, V Putcha, A Alian, A Sibaja-Hernandez, ... 2017 IEEE International Electron Devices Meeting (IEDM), 17.1. 1-17.1. 4, 2017 | 20 | 2017 |
| Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning M Hauptmann, S Brems, E Camerotto, A Zijlstra, G Doumen, T Bearda, ... Microelectronic engineering 87 (5-8), 1512-1515, 2010 | 20 | 2010 |
| The influence of dissolved carbon dioxide on cavitation intensity in ultrasound cleaning systems S Brems, M Hauptmann, E Camerotto, A Pacco, H Struyf, P Mertens, ... Japanese journal of applied physics 52 (6R), 066602, 2013 | 19 | 2013 |
| Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below S Decoster, E Camerotto, G Murdoch, S Kundu, QT Le, Z Tőkei, G Jurczak, ... Journal of Vacuum Science & Technology B 40 (3), 2022 | 16 | 2022 |
| Top-down InGaAs nanowire and fin vertical FETs with record performance S Ramesh, T Ivanov, E Camerotto, N Sun, J Franco, A Sibaja-Hernandez, ... 2016 IEEE Symposium on VLSI Technology, 1-2, 2016 | 13 | 2016 |
| Key factors to sustain the extension of a MHM-based integration scheme to medium and high porosity PECVD low-k materials Y Travaly, J Van Aelst, V Truffert, P Verdonck, T Dupont, E Camerotto, ... 2008 International Interconnect Technology Conference, 52-54, 2008 | 8 | 2008 |
| Physical forces exerted by microbubbles on a surface in a traveling wave field S Brems, M Hauptmann, E Camerotto, PW Mertens, M Heyns, H Struyf, ... Ultrasonics 54 (2), 706-709, 2014 | 7 | 2014 |
| Towards an improved megasonic cleaning process: influence of surface tension on bubble activity in acoustic fields E Camerotto, S Brems, M Hauptmann, J Lurquin, H Struyf, PW Mertens, ... Solid State Phenomena 195, 173-176, 2013 | 7 | 2013 |
| The influence of the angle of incidence in megasonic cleaning S Brems, M Hauptmann, E Camerotto, XM Xu, S De Gendt, M Heyns, ... Solid State Phenomena 187, 163-166, 2012 | 7 | 2012 |
| The importance of cavitation hysteresis in megasonic cleaning E Camerotto, S De Gendt, M Hauptmann, D Shamiryan, M Heyns, ... Solid State Phenomena 187, 171-175, 2012 | 7 | 2012 |
| MP18–26 Ru Direct-Etch Integration Development with Leakage Improvement and Increased Aspect Ratio A Pokhrel, G Marti, M O’Toole, G Murdoch, A Gupta, S Decoster, S Kundu, ... 2022 IEEE International Interconnect Technology Conference (IITC), 61-63, 2022 | 6 | 2022 |
| Understanding the factors affecting contact resistance in nanowire field effect transistors (NWFETs) to improve nanoscale contacts for future scaling S Ramesh, T Ivanov, A Sibaja-Hernandez, A Alian, E Camerotto, ... Journal of Applied Physics 132 (2), 2022 | 3 | 2022 |
| Influence of gas type on ultrasound cleaning efficiency S Brems, M Hauptmann, E Camerotto, X XiuMei, TG Kim, H Struyf, ... Proc. 20th Int. Congr. Acoustics, 1-4, 2010 | 3 | 2010 |
| Impact of acoustical reflections on megasonic cleaning performance S Brems, M Hauptmann, E Camerotto, A Pacco, S Halder, A Zijlstra, ... ECS Transactions 25 (5), 287, 2009 | 3 | 2009 |
| Stroboscopic schlieren study of bubble formation during megasonic agitation M Hauptmann, S Brems, E Camerotto, PW Mertens, M Heyns, S De Gendt, ... Solid State Phenomena 187, 185-189, 2012 | 2 | 2012 |
| Influence of Dissolved CO2 on Bubble Activity in Pulsed Acoustic Fields S Brems, M Hauptmann, E Camerotto, A Pacco, H Struyf, M Heyns, ... Solid State Phenomena 195, 177-180, 2013 | 1 | 2013 |
