| Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates MA Huff, M Ozgur US Patent 6,815,739, 2004 | 287 | 2004 |
| Characterization of broad-band transmission for coplanar waveguides on CMOS silicon substrates V Milanovic, M Ozgur, DC DeGroot, JA Jargon, M Gaitan, ME Zaghloul IEEE transactions on microwave theory and techniques 46 (5), 632-640, 1998 | 142 | 1998 |
| Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates MA Huff, M Ozgur US Patent 7,012,327, 2006 | 89 | 2006 |
| Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates MA Huff, M Ozgur US Patent 7,045,440, 2006 | 73 | 2006 |
| High Q backside micromachined CMOS inductors M Ozgur, ME Zaghloul, M Gaitan 1999 IEEE International Symposium on Circuits and Systems (ISCAS) 2, 577-580, 1999 | 47 | 1999 |
| Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure M Pedersen, M Ozgur, MA Huff US Patent 7,024,936, 2006 | 40 | 2006 |
| Integrated electromechanical switch and tunable capacitor and method of making the same M Ozgur US Patent 6,800,912, 2004 | 39 | 2004 |
| Optimization of backside micromachined CMOS inductors for RF applications M Ozgur, ME Zaghloul, M Gaitan 2000 IEEE International Symposium on Circuits and Systems (ISCAS) 5, 185-188, 2000 | 39 | 2000 |
| Method for making CMOS-based monolithic micro electromechanical system (MEMS) integrated circuits and integrated circuits made thereby M Ozgur, M Zaghloul US Patent App. 10/218,902, 2003 | 37* | 2003 |
| Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates M Huff, M Ozgur US Patent App. 11/052,302, 2005 | 34 | 2005 |
| Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure M Pedersen, M Ozgur, MA Huff US Patent 7,188,530, 2007 | 29 | 2007 |
| Quasi-TEM characteristic impedance of micromachined CMOS coplanar waveguides M Ozgur, V Milanov, C Zincke, M Gaitan, ME Zaghloul IEEE Transactions on Microwave Theory and Techniques 48 (5), 852-854, 2000 | 29 | 2000 |
| Method of making an integrated electromechanical switch and tunable capacitor M Ozgur US Patent 6,969,630, 2005 | 20 | 2005 |
| Micromachined 28-GHz power divider in CMOS technology M Ozgur, ME Zaghloul, M Gaitan IEEE Microwave and guided wave letters 10 (3), 99-101, 2000 | 20 | 2000 |
| Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices M Ozgur, P Sunal, OH Lance, M Huff, M Pedersen US Patent 9,852,870, 2017 | 19 | 2017 |
| Plasma etching of deep high-aspect ratio features into silicon carbide M Ozgur, M Huff Journal of Microelectromechanical Systems 26 (2), 456-463, 2017 | 18 | 2017 |
| Versatile communication system and method of implementation using heterogeneous integration M Ozgur, M Pedersen, MA Huff US Patent 8,983,414, 2015 | 18 | 2015 |
| Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure M Pedersen, M Ozgur, MA Huff US Patent 7,017,419, 2006 | 17 | 2006 |
| Characterization of micromachined CMOS transmission lines for RF communications M Ozgur, V Milanovic, C Zincke, ME Zaghloul 1998 IEEE International Symposium on Circuits and Systems (ISCAS) 4, 353-356, 1998 | 8 | 1998 |
| Comparison of the etch mask selectivity of nickel and copper for a deep, anisotropic plasma etching process of silicon carbide (SiC) M Ozgur, M Pedersen, M Huff ECS Journal of Solid State Science and Technology 7 (2), P55, 2018 | 6 | 2018 |
