Microstructural evolution during film growth I Petrov, PB Barna, L Hultman, JE Greene
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (5 …, 2003
2122 2003 Stretchable batteries with self-similar serpentine interconnects and integrated wireless recharging systems S Xu, Y Zhang, J Cho, J Lee, X Huang, L Jia, JA Fan, Y Su, J Su, H Zhang, ...
Nature communications 4 (1), 1543, 2013
1531 2013 A novel pulsed magnetron sputter technique utilizing very high target power densities V Kouznetsov, K Macak, JM Schneider, U Helmersson, I Petrov
Surface and coatings technology 122 (2-3), 290-293, 1999
1356 1999 Growth of semiconducting graphene on palladium SY Kwon, CV Ciobanu, V Petrova, VB Shenoy, J Bareno, V Gambin, ...
Nano letters 9 (12), 3985-3990, 2009
467 2009 Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering JE Greene, JE Sundgren, L Hultman, I Petrov, DB Bergstrom
Applied physics letters 67 (20), 2928-2930, 1995
452 1995 Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit C Kisielowski, B Freitag, M Bischoff, H Van Lin, S Lazar, G Knippels, ...
Microscopy and Microanalysis 14 (5), 469-477, 2008
396 2008 Pathways of atomistic processes on TiN(001) and (111) surfaces during film growth: an ab initio study D Gall, S Kodambaka, MA Wall, I Petrov, JE Greene
Journal of Applied Physics 93 (11), 9086-9094, 2003
390 2003 Surface changes on LiNi0. 8Co0. 2O2 particles during testing of high-power lithium-ion cells DP Abraham, RD Twesten, M Balasubramanian, I Petrov, J McBreen, ...
Electrochemistry communications 4 (8), 620-625, 2002
384 2002 Microstructure modification of TiN by ion bombardment during reactive sputter deposition I Petrov, L Hultman, U Helmersson, JE Sundgren, JE Greene
Thin Solid Films 169 (2), 299-314, 1989
375 1989 Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge K Macák, V Kouznetsov, J Schneider, U Helmersson, I Petrov
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18 (4 …, 2000
369 2000 Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion AP Ehiasarian, JG Wen, I Petrov
Journal of applied physics 101 (5), 2007
367 2007 Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure I Petrov, L Hultman, JE Sundgren, JE Greene
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10 (2 …, 1992
295 1992 High‐flux low‐energy (≂ 20 eV) N+ 2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation L Hultman, JE Sundgren, JE Greene, DB Bergstrom, I Petrov
Journal of Applied Physics 78 (9), 5395-5403, 1995
290 1995 Microscopy and spectroscopy of lithium nickel oxide-based particles used in high power lithium-ion cells DP Abraham, RD Twesten, M Balasubramanian, J Kropf, D Fischer, ...
Journal of The Electrochemical Society 150 (11), A1450, 2003
286 2003 Highly sensitive, mechanically stable nanopore sensors for DNA analysis BM Venkatesan, B Dorvel, S Yemenicioglu, N Watkins, I Petrov, R Bashir
Advanced materials (Deerfield Beach, Fla.) 21 (27), 2771, 2009
284 2009 Average energy deposited per atom: a universal parameter for describing ion‐assisted film growth? I Petrov, F Adibi, JE Greene, L Hultman, JE Sundgren
Applied physics letters 63 (1), 36-38, 1993
284 1993 Crystal growth and microstructure of polycrystalline Ti1− xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering U Wahlström, L Hultman, JE Sundgren, F Adibi, I Petrov, JE Greene
Thin Solid Films 235 (1-2), 62-70, 1993
281 1993 Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy D Gall, I Petrov, N Hellgren, L Hultman, JE Sundgren, JE Greene
Journal of Applied Physics 84 (11), 6034-6041, 1998
270 1998 Self-organized nanocolumnar structure in superhard TiB2 thin films PH Mayrhofer, C Mitterer, JG Wen, JE Greene, I Petrov
Applied Physics Letters 86 (13), 2005
269 2005 Synthesis of metastable epitaxial zinc‐blende‐structure AlN by solid‐state reaction I Petrov, E Mojab, RC Powell, JE Greene, L Hultman, JE Sundgren
Applied physics letters 60 (20), 2491-2493, 1992
266 1992 
Joe GreeneProfessor of Materials Science and Physics, University of IllinoisEmail verificata su uiuc.edu
