David J. Michalak
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Nanopatterning Si (111) surfaces as a selective surface-chemistry route
DJ Michalak, SR Amy, D Aureau, M Dai, A Estève, YJ Chabal
Nature materials 9 (3), 266-271, 2010
High-resolution X-ray photoelectron spectroscopic studies of alkylated silicon (111) surfaces
LJ Webb, EJ Nemanick, JS Biteen, DW Knapp, DJ Michalak, MC Traub, ...
The Journal of Physical Chemistry B 109 (9), 3930-3937, 2005
Dielectric layers having ordered elongate pores
DJ Michalak, RL Bristol, A Sengupta, MJ Kobrinsky
US Patent App. 14/108,255, 2015
Scalable quantum circuit and control for a superconducting surface code
R Versluis, S Poletto, N Khammassi, B Tarasinski, N Haider, DJ Michalak, ...
Physical Review Applied 8 (3), 034021, 2017
Chemical and electrical passivation of single-crystal silicon (100) surfaces through a two-step chlorination/alkylation process
EJ Nemanick, PT Hurley, LJ Webb, DW Knapp, DJ Michalak, ...
The Journal of Physical Chemistry B 110 (30), 14770-14778, 2006
Transmission infrared spectroscopy of methyl-and ethyl-terminated silicon (111) surfaces
LJ Webb, S Rivillon, DJ Michalak, YJ Chabal, NS Lewis
The Journal of Physical Chemistry B 110 (14), 7349-7356, 2006
Chlorination of hydrogen-terminated silicon (111) surfaces
S Rivillon, YJ Chabal, LJ Webb, DJ Michalak, NS Lewis, MD Halls, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 23 (4 …, 2005
Infrared spectroscopic investigation of the reaction of hydrogen-terminated,(111)-oriented, silicon surfaces with liquid methanol
DJ Michalak, S Rivillon, YJ Chabal, A Esteve, NS Lewis
The Journal of Physical Chemistry B 110 (41), 20426-20434, 2006
High-resolution soft X-ray photoelectron spectroscopic studies and scanning auger microscopy studies of the air oxidation of alkylated silicon (111) surfaces
LJ Webb, DJ Michalak, JS Biteen, BS Brunschwig, ASY Chan, DW Knapp, ...
The Journal of Physical Chemistry B 110 (46), 23450-23459, 2006
Electrochemical and electrical behavior of (111)-oriented Si surfaces alkoxylated through oxidative activation of Si− H bonds
JA Haber, I Lauermann, D Michalak, TP Vaid, NS Lewis
The Journal of Physical Chemistry B 104 (43), 9947-9950, 2000
Investigation of the reactions during alkylation of chlorine-terminated silicon (111) surfaces
S Rivillon Amy, DJ Michalak, YJ Chabal, L Wielunski, PT Hurley, ...
The Journal of Physical Chemistry C 111 (35), 13053-13061, 2007
Defect structure and electronic properties of SiOC: H films used for back end of line dielectrics
TA Pomorski, BC Bittel, PM Lenahan, E Mays, C Ege, J Bielefeld, ...
Journal of Applied Physics 115 (23), 234508, 2014
Investigation of the chemical purity of silicon surfaces reacted with liquid methanol
DJ Michalak, SR Amy, A Esteve, YJ Chabal
The Journal of Physical Chemistry C 112 (31), 11907-11919, 2008
Porosity scaling strategies for low-k films
DJ Michalak, JM Blackwell, JM Torres, A Sengupta, LE Kreno, JS Clarke, ...
Journal of Materials Research 30 (22), 3363, 2015
Mechanical properties of high porosity low-k dielectric nano-films determined by Brillouin light scattering
S Bailey, E Mays, DJ Michalak, R Chebiam, S King, R Sooryakumar
Journal of Physics D: Applied Physics 46 (4), 045308, 2012
Effects of interfacial energetics on the effective surface recombination velocity of Si/liquid contacts
F Gstrein, DJ Michalak, WJ Royea, NS Lewis
The Journal of Physical Chemistry B 106 (11), 2950-2961, 2002
Surface etching, chemical modification and characterization of silicon nitride and silicon oxide—selective functionalization of Si3N4 and SiO2
LH Liu, DJ Michalak, TP Chopra, SP Pujari, W Cabrera, D Dick, JF Veyan, ...
Journal of Physics: Condensed Matter 28 (9), 094014, 2016
Role of inversion layer formation in producing low effective surface recombination velocities at Si/liquid contacts
WJ Royea, DJ Michalak, NS Lewis
Applied Physics Letters 77 (16), 2566-2568, 2000
Metallization of fluorocarbon-based dielectric for interconnects
F Gstrein, D Michalak
US Patent 9,111,939, 2015
Process technology scaling in an increasingly interconnect dominated world
JS Clarke, C George, C Jezewski, AM Caro, D Michalak, J Torres
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical …, 2014
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