| PECVD SiO2/Si3N4 double layers electrets on glass substrate Z Chen, Z Lv, J Zhang IEEE Transactions on Dielectrics and Electrical Insulation 15 (4), 915-919, 2008 | 31 | 2008 |
| A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure W Jiang, X Wang, J Zhang Sensors and Actuators A: Physical 163 (1), 159-163, 2010 | 30 | 2010 |
| Failure modes of doubly supported capacitive RF MEMS switches LX Zhang, JW Zhang, YP Zhao, TX Yu International Journal of Nonlinear Sciences and Numerical Simulation 3 (3-4 …, 2002 | 29 | 2002 |
| CMOS-compatible micromachined edge-suspended spiral inductors with high Q-factors and self-resonance frequencies KJ Chen, WC Hon, J Zhang, LLW Leung IEEE Electron Device Letters 25 (6), 363-365, 2004 | 27 | 2004 |
| A high-performance micro electret power generator based on microball bearings Z Yang, J Wang, J Zhang Journal of Micromechanics and Microengineering 21 (6), 065001, 2011 | 26 | 2011 |
| CMOS-compatible micromachining techniques for fabricating high-performance edge-suspended RF/microwave passive components on silicon substrates J Zhang, WC Hon, LLW Leung, KJ Chen Journal of micromechanics and microengineering 15 (2), 328, 2004 | 18 | 2004 |
| Design and fabrication of high performance wafer-level vacuum packaging based on glass–silicon–glass bonding techniques J Zhang, W Jiang, X Wang, J Zhou, H Yang Journal of Micromechanics and Microengineering 22 (12), 125022, 2012 | 17 | 2012 |
| A simple micro pirani vasuum gauge fabricated by bulk micromachining technology J Zhang, W Jiang, J Zhou, X Wang TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 15 | 2009 |
| Single-walled carbon nanotube pirani gauges prepared by DEP assembly F Yu, J Zhang IEEE Transactions on Nanotechnology 20 (3), 323-329, 2013 | 14 | 2013 |
| A novel betavoltaic microbattery based on SWNTs thin film-silicon heterojunction CC Chen, YY Chang, JW Zhang 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 14 | 2012 |
| Design and simulation of high conversion efficiency betavoltaic battery based on a stacked multilayer structure M Wu, J Zhang AIP Advances 9 (7), 2019 | 13 | 2019 |
| Improvement of the performance of the PECVD SiO2/Si3N4double-layer electrets J Zhang, X Zou, Y Zhang IEEE Transactions on Dielectrics and Electrical Insulation 18 (2), 456-462, 2011 | 13 | 2011 |
| A micro power generator using PECVD SiO2/Si3N4 double layer as electret Z Yang, J Wang, J Zhang Proc. PowerMEMS, 317-20, 2008 | 13 | 2008 |
| A betavoltaic microcell based on Au/s-SWCNTs/Ti Schottky junction Y Chang, C Chen, P Liu, J Zhang Sensors and Actuators A: Physical 215, 17-21, 2014 | 12 | 2014 |
| Characterization and attenuation mechanism of CMOS-compatible micromachined edge-suspended coplanar waveguides on low-resistivity silicon substrate LLW Leung, WC Hon, J Zhang, KJ Chen IEEE transactions on advanced packaging 29 (3), 496-503, 2006 | 11 | 2006 |
| A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge K Chen, Y Dai, X Zou, J Zhang 2009 4th IEEE International Conference on Nano/Micro Engineered and …, 2009 | 10 | 2009 |
| Simulation of threshold voltage adjustment by B+ implantation for pMOS-RADFET application S Wang, P Liu, J Zhang The 8th Annual IEEE International Conference on Nano/Micro Engineered and …, 2013 | 9 | 2013 |
| Study on PECVD SiO2/Si3N4 double-layer electrets with different thicknesses XD Zou, JW Zhang Science China Technological Sciences 54, 2123-2129, 2011 | 9 | 2011 |
| Single-walled carbon nanotube film-silicon heterojunction radioisotope betavoltaic microbatteries P Liu, Y Chang, J Zhang Journal of Micromechanics and Microengineering 24 (5), 055026, 2014 | 7 | 2014 |
| Design and simulation of 4-bit 10-14GHz RF MEMS tunable filter X Zou, K Chen, H Zhang, J Zhang 2009 4th IEEE International Conference on Nano/Micro Engineered and …, 2009 | 7 | 2009 |
