| Embedded micromechanical devices for the monolithic integration of MEMS with CMOS JH Smith, S Montague, JJ Sniegowski, JR Murray, PJ McWhorter Proceedings of International Electron Devices Meeting, 609-612, 1995 | 324 | 1995 |
| IC-compatible polysilicon surface micromachining JJ Sniegowski, MP De Boer Annual Review of Materials Science 30 (1), 299-333, 2000 | 312 | 2000 |
| Design of compliant mechanisms: applications to MEMS S Kota, J Joo, Z Li, SM Rodgers, J Sniegowski Analog integrated circuits and signal processing 29, 7-15, 2001 | 301 | 2001 |
| Characteristics of polysilicon resonant microbeams JD Zook, DW Burns, H Guckel, JJ Sniegowski, RL Engelstad, Z Feng Sensors and Actuators A: Physical 35 (1), 51-59, 1992 | 299 | 1992 |
| Surface micromachined microengine EJ Garcia, JJ Sniegowski Sensors and Actuators A: Physical 48 (3), 203-214, 1995 | 280 | 1995 |
| Fabrication of micromechanical devices from polysilicon films with smooth surfaces H Guckel, JJ Sniegowski, TR Christenson, S Mohney, TF Kelly Sensors and Actuators 20 (1-2), 117-122, 1989 | 264 | 1989 |
| The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers H Guckel, JJ Sniegowski, TR Christenson, F Raissi Sensors and Actuators A: Physical 21 (1-3), 346-351, 1990 | 209 | 1990 |
| Method for integrating microelectromechanical devices with electronic circuitry S Montague, JH Smith, JJ Sniegowski, PJ McWhorter US Patent 5,798,283, 1998 | 143 | 1998 |
| Surface-micromachined gear trains driven by an on-chip electrostatic microengine JJ Sniegowski, EJ Garcia IEEE Electron Device Letters 17 (7), 366-368, 1996 | 142 | 1996 |
| Use of silicon oxynitride as a sacrificial material for microelectromechanical devices SD Habermehl, JJ Sniegowski US Patent 6,174,820, 2001 | 136 | 2001 |
| Microelectromechanical apparatus for elevating and tilting a platform SL Miller, PJ McWhorter, MS Rodgers, JJ Sniegowski, SM Barnes US Patent 6,545,385, 2003 | 115 | 2003 |
| Polysilicon resonating beam transducers and method of producing the same H Guckel, J Sniegowski US Patent 5,188,983, 1993 | 115 | 1993 |
| Polysilicon resonating beam transducers H Guckel, J Sniegowski US Patent 5,090,254, 1992 | 113 | 1992 |
| Use of chemical mechanical polishing in micromachining RD Nasby, DL Hetherington, JJ Sniegowski, PJ McWhorter, CA Apblett US Patent 5,804,084, 1998 | 106 | 1998 |
| System and method for treating glaucoma J Koonmen, N Smith, J Sniegowski, S Barnes, P McWhorter, M Rodgers US Patent App. 11/209,357, 2006 | 105 | 2006 |
| Microfabricated actuators and their application to optics JJ Sniegowski, EJ Garcia Micro-Optics/Micromechanics and Laser Scanning and Shaping 2383, 46-64, 1995 | 102 | 1995 |
| Implant having MEMS flow module with movable, flow-controlling baffle JJ Sniegowski, PJ McWhorter, MS Rodgers US Patent 7,364,564, 2008 | 98 | 2008 |
| Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment AJ Farino, S Montague, JJ Sniegowski, JH Smith, PJ McWhorter US Patent 5,783,340, 1998 | 92 | 1998 |
| Friction in surface-micromachined microengines SL Miller, JJ Sniegowski, G LaVigne, PJ McWhorter Smart Structures and Materials 1996: Smart Electronics and MEMS 2722, 197-204, 1996 | 90 | 1996 |
| Surface micromachined optical system with reinforced mirror microstructure JJ Sniegowski, MS Rodgers US Patent 6,600,587, 2003 | 89 | 2003 |
